Wafer, Glass Panel Measurement System
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작성일 2016.07.10본문
1. Optical Wafer Thickness MicroGauge (OWTM)
1) Introduction
FIBERPRO OWTM can measure Thickness, TTV, LTV, Warp and Bow of various kinds of wafers which are light-reflected materials.
2) Application: Si Wafer / Sapphire Wafer / Glass Wafer / SiO2 / GaAs material manufacturing process.
[Sapphire Wafer] [Silicon Wafer] [Glass Wafer]
3) Product (Accuracy: 0.2um ~ 0.5um)
* IFP-801S: Up to 6 inch Wafer
* IFP-801: Up to 12 inch Wafer
* IFP-801L: Up to 18 inch Wafer
[IFP-801S] [IFP-801]
[Operating Video]
4) Measurement Point: Thickness/TTV/LTV/Warp/Bow/Flatness
[Measurement GUI]
** Site: http://www.fiberpro.com/eng/ds2_1_7.html?no=87&t=3
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2. Optical Thickness Measurement System (OTMS)
1) Introduction
FIBERPRO OTMS uses the principle of white light interferometer-based technology and non-contact method for online or off-line thickness measurement.
2) Measurement Point: Thickness
3) Application
* Material: Si-Wafer, Sa-Wafer, Glass Wafer, SiO2, GaAS, Others
* Industry: LCD glass panel, Glass products, medical membranes, ophthalmic products,
Etc
[Glass flat panel] [Wafer, Panel] [Contact lens]
4) Product
* IFP-800-2
- Range: 50um ~ 2,000um
- Accuracy: 0.2um
* IFP-800-10
- Range: 2,000um ~ 10.0mm
- Accuracy: 1.0um
** Site: http://www.fiberpro.com/eng/ds2_1_7.html?no=102&t=3
# Contact Point
- E-mail: sales@fiberpro.com
- Phone: +82-42-360-0037
- Name: Mr. Lee, Jongbo
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